Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface...
Reexamination Certificate
2005-02-22
2005-02-22
Koehler, Robert R. (Department: 1775)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
C134S002000, C134S003000, C205S662000, C205S674000, C205S675000, C205S676000, C205S684000, C205S705000, C205S717000, C205S721000, C205S722000, C205S723000, C252S079100, C252S079200, C252S079300, C252S079400
Reexamination Certificate
active
06858124
ABSTRACT:
The present invention provides methods of polishing and/or cleaning copper interconnects using sulfonic acid compositions.
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Kesari Susrut
Lamanna William M.
Parent Michael J.
Zazzera Lawrence A.
3M Innovative Properties Company
Koehler Robert R.
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