Optical: systems and elements – Diffusing of incident light
Reexamination Certificate
2007-04-03
2007-04-03
Dunn, Drew A. (Department: 2872)
Optical: systems and elements
Diffusing of incident light
Reexamination Certificate
active
10131185
ABSTRACT:
This invention relates to an apparatus for optical beam shaping and diffusing, a method for making the apparatus, and a method for using the apparatus. The apparatus comprises a crystalline material object shaped to fit within an optical train and with a pattern of surface texture along an optical path. Surface removal processes are applied to a portion of a surface of an object made of a crystalline material to form a surface texture pattern at that portion of the surface of the object. The surface texture pattern depends upon: (1) the identity of the crystalline material and (2) the orientation of crystal lattice axes within the object with respect to the portion of the surface of the object where the pattern of surface texture is to be formed. Processes for making the apparatus include, but are not limited to, mechanical grinding, ablating, chemical etching, plasma etching, ion milling, and combinations thereof. The arrangement of the pattern of surface texture can be refined by coupling lithographic patterning methods with any of the surface removal processes. The apparatus can be used to change one or more of: (1) a shape, (2) an orientation, (3) an aspect ratio, (4) an angular pupil distribution, and (5) an intensity profile of a cross section of an optical beam.
REFERENCES:
patent: 5553174 (1996-09-01), Snyder
patent: 5610733 (1997-03-01), Feldman et al.
patent: 5663980 (1997-09-01), Adachi
patent: 5706134 (1998-01-01), Konno et al.
patent: 5756981 (1998-05-01), Roustaei et al.
patent: 5811021 (1998-09-01), Zarowin et al.
patent: 5814885 (1998-09-01), Pogge et al.
patent: 5850300 (1998-12-01), Kathman et al.
patent: 5923425 (1999-07-01), Dewa et al.
patent: 5962195 (1999-10-01), Yen et al.
patent: 6014361 (2000-01-01), Nagashima et al.
patent: 6021009 (2000-02-01), Borodovsky et al.
patent: 6025938 (2000-02-01), Kathman et al.
patent: 6069739 (2000-05-01), Borodovsky et al.
patent: 6075627 (2000-06-01), Feldman et al.
patent: 6075650 (2000-06-01), Morris et al.
patent: 6166389 (2000-12-01), Shie et al.
patent: 6256146 (2001-07-01), Merrill et al.
patent: 6297906 (2001-10-01), Allen et al.
patent: 6333817 (2001-12-01), Kashima et al.
patent: 6483976 (2002-11-01), Shie et al.
patent: 2002/0163719 (2002-11-01), Ma et al.
ASML Holdings N.V.
Dunn Drew A.
Pritchett Joshua L.
Sterne Kessler Goldstein & Fox PLLC
LandOfFree
Methods for optical beam shaping and diffusing does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods for optical beam shaping and diffusing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods for optical beam shaping and diffusing will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3766525