Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-02-21
2009-10-13
Lee (Andrew), Hwa S (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07602503
ABSTRACT:
A method for measuring a wavefront of an optical system. A first step of the method includes directing electromagnetic radiation uniformly at an object plane having a first grating positioned therein. Lines of the first grating comprise a plurality of dots. A second step of the method includes projecting an image of the first grating onto a focal plane having a second grating positioned therein. A third step of the method includes measuring the wavefront of the optical system based on a fringe pattern produced by the second grating.
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Translation of Office Action and Off
ASML Holdings N.V.
Lee (Andrew) Hwa S
Sterne Kessler Goldstein & Fox P.L.L.C.
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