Optics: measuring and testing – Refraction testing
Reexamination Certificate
2004-05-14
2008-03-25
Punnoose, Roy M. (Department: 2886)
Optics: measuring and testing
Refraction testing
Reexamination Certificate
active
07349079
ABSTRACT:
A method for measurement of a specimen is provided. The method includes measuring spectroscopic ellipsometric data of the specimen. The method also includes determining a nitrogen concentration of a nitrided oxide gate dielectric formed on the specimen from the spectroscopic ellipsometric data. A computer-implemented method for analysis of a specimen is also provided. This method includes determining a nitrogen concentration of a nitrided oxide gate dielectric formed on the specimen from spectroscopic ellipsometric data generated by measurement of the specimen. In some embodiments, the methods described above may include determining an index of refraction of the nitrided oxide gate dielectric from the spectroscopic ellipsometric data and determining the nitrogen concentration from the index of refraction. In another embodiment, the methods described above may include measuring reflectometric data of the specimen. The nitrogen concentration may be determined from the spectroscopic ellipsometric data in combination with the reflectometric data.
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Kaack Torsten
Tan Zhengquan
Yoo Sungchul
Zhao Qiang
Baker & McKenzie LLP
KLA-Tencor Technologies Corp.
Punnoose Roy M.
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