Methods for manufacturing cold cathode arrays

Details Methods for manufacturing cold cathode arrays Methods for manufacturing cold cathode arrays

1995-12-04

1997-12-02

Breneman, R. Bruce

Etching a substrate: processes

Forming or treating an article whose final configuration has...

216 39, 216 49, 216 88, 313310, 445 24, 445 50, 445 51, H01J 902

Patent

active

056932359

ABSTRACT:
A cold cathode emitter structure is described together with two methods for manufacturing it. These methods are cost effective and relatively simple to implement. A key feature is the incorporation of chemical-mechanical polishing into the process. This allows the micro-cones, that serve as cold cathodes, to be easily positioned so that their apexes are located at the correct height relative to the gate lines. A second important feature is that the openings in the gate lines through which the emitted electrons will pass are made to be significantly narrower than in conventional designs.

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Lee, et al "A New Approach to Manufaturing Field Emitter Arrays with Submicron Gate Apertures" IVMC '95, Eighth Intl Vacuum Microel.Conf., NY, pp. 14-17, Jul. 1995.

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