Methods for managing examination of foreign matters in...

Details Methods for managing examination of foreign matters in... Methods for managing examination of foreign matters in...

2005-03-01

2005-03-01

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

C356S237200

Reexamination Certificate

active

06862089

ABSTRACT:
A method for managing an apparatus for examination of foreign matters in through holes is provided which can readily judge the presence or absence of a change in the examination conditions in the apparatus for examining foreign matters in through holes, and efficiently conduct a management of the apparatus. When light passing through a minute through hole formed in a workpiece are taken by a camera as image data, and the presence or absence of a foreign matter in the through hole is examined based on an area of passing light that corresponds to the through hole examined, a reference workpiece is selected, an operation to measure an area of light passing through the through holes of the reference workpiece is periodically performed and measured values are stored in a data base, a change state in the area of passing light obtained from the data base is compared with pre-set management standard values, and an adjustment timing and an adjustment object in the examination apparatus are selected to perform an examination adjustment.

REFERENCES:
patent: 3873211 (1975-03-01), Watson
patent: 4145714 (1979-03-01), Nakajima et al.
patent: 5808734 (1998-09-01), Kolari
patent: 5923430 (1999-07-01), Worster et al.
patent: 5963314 (1999-10-01), Worster et al.
patent: 5-215696 (1993-08-01), None
patent: 11-304419 (1999-11-01), None
patent: 2000-292365 (2000-10-01), None

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