Methods for making photodectors

Details Methods for making photodectors Methods for making photodectors

1989-09-06

1991-06-25

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG102, 148DIG143, 437 3, 437187, 437924, H01L 2100, H01L 3118

Patent

active

050266608

ABSTRACT:
A shadow-masking process for manufacturing low dark current photodetectors with low noise characteristics is disclosed. The process includes shadow-masking a semiconductor wafer by positioning a patterned shadow-mask on a surface of the wafer. The shadow-mask is patterned with, for example, circular openings or stripe openings. Layers, such as metallization layers to form metallic contacts or anti-reflection layers are deposited onto the wafer through the patterned openings in the shadow-masks. This shadow-masking process may be used in the production of any semiconductor device requiring patterned layers.

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