Methods for machining ceramics

Details Methods for machining ceramics Methods for machining ceramics

2007-12-11

2007-12-11

Culbert, Roberts (Department: 1763)

Etching a substrate: processes

Nongaseous phase etching of substrate

Using film of etchant between a stationary surface and a...

Reexamination Certificate

active

10423283

ABSTRACT:
A method for machining a ceramic substrate containing Al, including providing a slurry between a substrate and a machine tool, the slurry containing alumina abrasive and an additive including a phosphorus compound, and moving the substrate relative to the machine tool.

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