Methods for investigating an object by means of a reflectable ra

Details Methods for investigating an object by means of a reflectable ra Methods for investigating an object by means of a reflectable ra

1993-11-08

1995-03-28

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

348126, 356376, G01V 904

Patent

active

054019796

ABSTRACT:
Methods, devices and an image sensor for investigating an object (13) by means of a reflectable radiation beam (25) which forms a spot (24) on the object which can be moved relative to the object (13), whereby the actual position of the spot on the object is determined by means of the reflected portion of the radiation beam detected by an optical detector (23), while the desired position of the spot relative to the object is determined by means of a multidimensional image sensor (21). The radiation beam can subsequently be moved relative to the object until the actual position of the spot corresponds to the desired position of the spot, or differences between the actual and the desired position of the spot may be determined as a measure for differences in the distance between the object and a reference plane (62).

REFERENCES:
patent: 5166753 (1992-11-01), Tokura
patent: 5212390 (1993-05-01), LeBeau et al.
"Optical Position Sensing Using Silicon Photodetectors", by Bill Light, Assoc Editor, Laser & Applications, Apr. 1986, pp. 75-79.

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