Methods for forming index guided vertical cavity surface...

Details Methods for forming index guided vertical cavity surface... Methods for forming index guided vertical cavity surface...

2005-02-08

2005-02-08

Zarabian, Amir (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S029000, C438S039000, C372S045013

Reexamination Certificate

active

06852558

ABSTRACT:
Planar index guided vertical cavity surface emitting laser (PIG VCSEL) utilizes index guiding to provide improved optical confinement and proton implantation to improve current confinement. Index guiding is achieved by etching index guide openings (holes or partial ridges) around the optical confinement region and may be adjusted by varying the etched volume of the index guide openings (holes and partial ridges). The top contact surface area is increased in the PIG VCSEL thereby lowering contact and device resistance to improve VCSEL performance further. The PIG VCSEL is a substantially planarized device for ease of manufacture.

REFERENCES:
patent: 3506275 (1970-04-01), Kressel et al.
patent: 3878105 (1975-04-01), Palmer
patent: 3974514 (1976-08-01), Kressel et al.
patent: 3978428 (1976-08-01), Burnham et al.
patent: 4033796 (1977-07-01), Burnham et al.
patent: 4110661 (1978-08-01), Harris, Jr. et al.
patent: 4249967 (1981-02-01), Liu et al.
patent: 4309670 (1982-01-01), Burnham et al.
patent: 4347611 (1982-08-01), Scifres et al.
patent: 4376946 (1983-03-01), Kaminow et al.
patent: 4573163 (1986-02-01), Kaminow
patent: 4633476 (1986-12-01), Scifres et al.
patent: 4636821 (1987-01-01), Yanase et al.
patent: 4675875 (1987-06-01), Takamiya
patent: 4694549 (1987-09-01), Rabe
patent: 4730326 (1988-03-01), Taneya et al.
patent: 4740481 (1988-04-01), Wilson et al.
patent: 4745462 (1988-05-01), Dischert et al.
patent: 4757509 (1988-07-01), Isshiki et al.
patent: 4764936 (1988-08-01), Taneya et al.
patent: 4766470 (1988-08-01), Scholl et al.
patent: 4772082 (1988-09-01), Matsui et al.
patent: 4819048 (1989-04-01), Mand et al.
patent: 4847844 (1989-07-01), Noda et al.
patent: 4852110 (1989-07-01), Fujii et al.
patent: 4853936 (1989-08-01), Matsui et al.
patent: 4856014 (1989-08-01), Figueroa et al.
patent: 4856017 (1989-08-01), Ungar
patent: 4942585 (1990-07-01), Ungar
patent: 4943970 (1990-07-01), Bradley
patent: 4949350 (1990-08-01), Jewell et al.
patent: 4949351 (1990-08-01), Imanaka
patent: 4958202 (1990-09-01), Kinoshita et al.
patent: 4967241 (1990-10-01), Kinoshita et al.
patent: 4974036 (1990-11-01), Kapon
patent: 4982409 (1991-01-01), Kinoshita et al.
patent: 4990466 (1991-02-01), Shieh et al.
patent: 4991179 (1991-02-01), Deppe et al.
patent: 5018157 (1991-05-01), Deppe et al.
patent: 5029175 (1991-07-01), Ohnaka et al.
patent: 5033053 (1991-07-01), Shimizu et al.
patent: 5033054 (1991-07-01), Scifres et al.
patent: 5034958 (1991-07-01), Kwon et al.
patent: 5038356 (1991-08-01), Botez et al.
patent: 5040032 (1991-08-01), Kapon
patent: 5043775 (1991-08-01), Lee
patent: 5045498 (1991-09-01), Wang et al.
patent: 5050155 (1991-09-01), Kurata et al.
patent: 5063569 (1991-11-01), Xie
patent: 5068868 (1991-11-01), Deppe et al.
patent: 5088099 (1992-02-01), Chen et al.
patent: 5115441 (1992-05-01), Kopf et al.
patent: 5115442 (1992-05-01), Lee et al.
patent: 5128955 (1992-07-01), Danielmeyer
patent: 5132982 (1992-07-01), Chan et al.
patent: 5136603 (1992-08-01), Hasnain et al.
patent: 5143863 (1992-09-01), Ohnaka et al.
patent: 5148267 (1992-09-01), Ty Tan et al.
patent: 5155560 (1992-10-01), Sheperd
patent: 5159603 (1992-10-01), Kim
patent: 5160492 (1992-11-01), Wang et al.
patent: 5164329 (1992-11-01), Moyer et al.
patent: 5206871 (1993-04-01), Deppe et al.
patent: 5216686 (1993-06-01), Holm et al.
patent: 5223204 (1993-06-01), Endoh
patent: 5231642 (1993-07-01), Scifres et al.
patent: 5237581 (1993-08-01), Asada et al.
patent: 5239189 (1993-08-01), Lawrence
patent: 5245622 (1993-09-01), Jewell et al.
patent: 5247167 (1993-09-01), Bargerhuff et al.
patent: 5249245 (1993-09-01), Lebby et al.
patent: 5255278 (1993-10-01), Yamanaka
patent: 5256596 (1993-10-01), Ackley et al.
patent: 5258316 (1993-11-01), Ackley et al.
patent: 5258990 (1993-11-01), Olbright et al.
patent: 5266503 (1993-11-01), Wang et al.
patent: 5272375 (1993-12-01), Belopolsky
patent: 5274655 (1993-12-01), Shieh et al.
patent: 5285466 (1994-02-01), Tabatabaie
patent: 5289018 (1994-02-01), Okuda et al.
patent: 5293392 (1994-03-01), Shieh et al.
patent: 5301201 (1994-04-01), Dutta et al.
patent: 5311533 (1994-05-01), Stutius et al.
patent: 5317587 (1994-05-01), Ackley et al.
patent: 5328854 (1994-07-01), Vakhshoori et al.
patent: 5331654 (1994-07-01), Jewell et al.
patent: 5341002 (1994-08-01), Plumb
patent: 5343487 (1994-08-01), Scott et al.
patent: 5345468 (1994-09-01), Choquette
patent: 5351257 (1994-09-01), Lebby et al.
patent: 5357591 (1994-10-01), Jiang et al.
patent: 5359447 (1994-10-01), Hahn et al.
patent: 5359618 (1994-10-01), Lebby et al.
patent: 5363393 (1994-11-01), Uomi et al.
patent: 5379312 (1995-01-01), Bour et al.
patent: 5387543 (1995-02-01), Ackley
patent: 5388120 (1995-02-01), Ackley et al.
patent: 5397739 (1995-03-01), Chalmers et al.
patent: 5397917 (1995-03-01), Ommen et al.
patent: 5399885 (1995-03-01), Thijs et al.
patent: 5400356 (1995-03-01), Bringans et al.
patent: 5403774 (1995-04-01), Shieh et al.
patent: 5412680 (1995-05-01), Swirhun et al.
patent: 5416044 (1995-05-01), Chino et al.
patent: 5420880 (1995-05-01), Tabatabaie et al.
patent: 5422901 (1995-06-01), Lebby et al.
patent: 5426657 (1995-06-01), Vakhshoori
patent: 5436192 (1995-07-01), Epler et al.
patent: 5438586 (1995-08-01), Ishii et al.
patent: 5442203 (1995-08-01), Adomi et al.
patent: 5448536 (1995-09-01), Muranishi et al.
patent: 5457328 (1995-10-01), Ishimatsu et al.
patent: 5465266 (1995-11-01), Bour et al.
patent: 5468656 (1995-11-01), Shieh et al.
patent: 5475701 (1995-12-01), Hibbs-Brenner
patent: 5485014 (1996-01-01), Jain et al.
patent: 5491712 (1996-02-01), Lin et al.
patent: 5493577 (1996-02-01), Choquette et al.
patent: 5513204 (1996-04-01), Jayaraman
patent: 5530715 (1996-06-01), Shieh et al.
patent: 5554061 (1996-09-01), Park et al.
patent: 5568499 (1996-10-01), Lear
patent: 5568504 (1996-10-01), Kock et al.
patent: 5574743 (1996-11-01), van der Poel et al.
patent: 5577064 (1996-11-01), Swirhun et al.
patent: 5596595 (1997-01-01), Tan et al.
patent: 5606572 (1997-02-01), Swirhun et al.
patent: 5638392 (1997-06-01), Ramdani et al.
patent: 5657339 (1997-08-01), Fukunaga
patent: 5671243 (1997-09-01), Yap
patent: 5696784 (1997-12-01), Srinivasan et al.
patent: 5706306 (1998-01-01), Jiang et al.
patent: 5708669 (1998-01-01), DiGiovanni et al.
patent: 5708674 (1998-01-01), Beernink et al.
patent: 5712865 (1998-01-01), Chow et al.
patent: 5717707 (1998-02-01), Beernink et al.
patent: 5719893 (1998-02-01), Jiang et al.
patent: 5719894 (1998-02-01), Jewell et al.
patent: 5732099 (1998-03-01), Kawasumi et al.
patent: 5732103 (1998-03-01), Ramdani et al.
patent: 5764676 (1998-06-01), Paoli et al.
patent: 5766981 (1998-06-01), Thornton et al.
patent: 5784398 (1998-07-01), Amann et al.
patent: 5796769 (1998-08-01), Ramdani et al.
patent: 5796771 (1998-08-01), DenBaars et al.
patent: 5812576 (1998-09-01), Bour
patent: 5812578 (1998-09-01), Schemmann et al.
patent: 5815524 (1998-09-01), Ramdani et al.
patent: 5825796 (1998-10-01), Jewell et al.
patent: 5831960 (1998-11-01), Jiang et al.
patent: 5832017 (1998-11-01), Ramdani et al.
patent: 5832019 (1998-11-01), Paoli et al.
patent: 5838707 (1998-11-01), Ramdani et al.
patent: 5848086 (1998-12-01), Lebby et al.
patent: 5877519 (1999-03-01), Jewell
patent: 5883918 (1999-03-01), Gubb et al.
patent: 5896408 (1999-04-01), Corzine et al.
patent: 5898722 (1999-04-01), Ramdani et al.
patent: 5903590 (1999-05-01), Hadley et al.
patent: 5914973 (1999-06-01), Jiang et al.
patent: 5917848 (1999-06-01), Claisse et al.
patent: 5943359 (1999-08-01), Ramdani et al.
patent: 5956363 (1999-09-01), Lebby et al.
patent: 5956364 (1999-09-01), Jiang et al.
patent: 5963576 (1999-10-01), Claisse et al.
patent: 5966399 (1999-10-01), Jiang et al.
patent: 5978408 (1999-11-01), Thornton
patent: 5985686 (1999-11-01), Jayaraman
patent: 6026108 (2000-02-01), Lim et al.
patent: 6118799 (2000-09-01), Okubo et al.
patent: 6160834 (2000-12-01), Scott
patent: 6169757 (2001-01-01), Merritt
patent: 6185241 (2001-02-01), Sun
patent: 6195381 (2001-02-01), Botez et al.
patent: 6252894 (2001-06-01), Sasanuma et al.
paten

Affiliated with

Also associated with

Rating

Methods for forming index guided vertical cavity surface... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods for forming index guided vertical cavity surface..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods for forming index guided vertical cavity surface... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3451610