Methods for forming composite coatings on MEMS devices

Details Methods for forming composite coatings on MEMS devices Methods for forming composite coatings on MEMS devices

2007-04-10

2007-04-10

Talbot, Brian K. (Department: 1762)

Coating processes

Electrical product produced

C427S255180, C427S255270, C427S099300, C427S255700, C427S387000

Reexamination Certificate

active

10641547

ABSTRACT:
The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

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