Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2007-03-13
2007-03-13
Bovernick, Rodney (Department: 2874)
Optical waveguides
With optical coupler
Switch
Reexamination Certificate
active
11176711
ABSTRACT:
An embodiment of the invention comprises an optical element capable of motion in at least one degree of freedom wherein the motion in at least one degree of freedom is enabled by serpentine hinges configured to enable the optical element to move in at least one degree of freedom. The embodiment further includes driving elements configured to deflect the optical element in said at least one degree of freedom to controllably induce deflection in the optical element and a damping element to reduce magnitude of resonances. Another embodiment includes a MEMS optical apparatus comprising an optical element capable of motion in two degrees of freedom. The two degrees of freedom are enabled by two pairs of serpentine hinges. A first pair of serpentine hinges is configured to enable the optical element to move in one degree of freedom and a second pair of serpentine hinges is configured to enable the optical element to move in a second degree of freedom. The apparatus further includes driving elements configured to deflect the optical element in said two degrees of freedom and a damping element to reduce magnitude of resonances. The invention includes method embodiments for forming arrays of MEMS optical elements including reflector arrays.
REFERENCES:
patent: 4662746 (1987-05-01), Hornbeck
patent: 5506394 (1996-04-01), Plesko
patent: 5724015 (1998-03-01), Tai et al.
patent: 5724123 (1998-03-01), Tanaka
patent: 5841917 (1998-11-01), Jungerman et al.
patent: 5872880 (1999-02-01), Maynard
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6097859 (2000-08-01), Solgaard et al.
patent: 6172817 (2001-01-01), Senapati et al.
patent: 6201629 (2001-03-01), McClelland et al.
patent: 6252466 (2001-06-01), Kawamura
patent: 6253001 (2001-06-01), Hoen
patent: 6283601 (2001-09-01), Hagelin et al.
patent: 6301403 (2001-10-01), Heanue et al.
patent: 6320993 (2001-11-01), Laor
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6360035 (2002-03-01), Hurst et al.
patent: 6430331 (2002-08-01), Hagelin et al.
patent: 6445844 (2002-09-01), Neukermans et al.
patent: 6483962 (2002-11-01), Novotny
patent: 6542665 (2003-04-01), Reed et al.
patent: 6549691 (2003-04-01), Street et al.
patent: 6556739 (2003-04-01), Kruglick
patent: 6563106 (2003-05-01), Bowers et al.
patent: 6577793 (2003-06-01), Vaganov
patent: 6580846 (2003-06-01), Burroughs et al.
patent: 6625341 (2003-09-01), Novotny
patent: 6697547 (2004-02-01), Walter et al.
patent: 6822776 (2004-11-01), Hah et al.
patent: 6914871 (2005-07-01), Hara et al.
patent: 2002/0005976 (2002-01-01), Behin et al.
patent: 2002/0063339 (2002-05-01), Sun et al.
patent: 2002/0130561 (2002-09-01), Temesvary et al.
patent: 2002/0171327 (2002-11-01), Miller et al.
patent: 2002/0186918 (2002-12-01), Burroughs
patent: WO 01/96924 (2001-12-01), None
U.S. Appl. No. 60/206,744, filed May 24, 2000, Novotny.
U.S. Appl. No. 60/241,269, filed Oct. 17, 2000, Novotny.
U.S. Appl. No. 60/211,239, filed Jun. 12, 2000, Novonty.
U.S. Appl. No. 09/981,628, filed Oct. 15, 2001, AO-555.
U.S. Appl. No. 10/035,829, filed Oct. 18, 2991, Novotny et al.
Walker, James A., “The Future of MEMS in Telecommunications Netowrks.” pp. R1-R7. Bell Laboratories, Lucent Technologies. Feb. 2, 2000.
Elwenspoek, et al., “Silcion Micromachining.” 1998. Cambridge Univeristy Press. Cover page, pp. 102-111, pp. 160-161, and p. 282.
Maluf, Nadim, “An Introduction to Microelectromechanical Systems Engineering.” 2000. Cover page, pp. 64-73 and 186-189.
Rai-Choudhury, “Handbook of Microlithography, Micromachining, and Microfabrication.” 1997. SPIE Optical Engineering Press. pp. 110-116 and 120-122.
Conant, Robert. et al., “A Flat High-Frequency Scanning Micromirror.” Solid State Sensor & Actuator Workshop, Hilton Head, SC. 2000.
Bishop, D.J., “Silicon Micromachines for Lightwave Networks: Can Little Machines Make it Big?” 83 pages. Feb. 1999.
Bishop, D.J., “Silicon Micromachines for Lightwave Networks: The Little Machines that will Make it Big.” SPIE vol. 11, No. 2, 12 pages. Dec. 2000.
Bishop, David J., et al., “The Rise of Optical Switching.” Scientifice American, pp. 88-94. Jan. 2001.
Blumenthal, Daniel J., “Routing Packets with Light.” Scientifice American, pp. 96-99. Jan. 2001.
Ehrfeld, Wolfgang, et al., “Application of Micro- and Nanotechnologies for the Fabrication of Optical Devices.” SPIE, vol. 3276, pp. 2-14. 1998.
Grade, John D., et al., “A Large-Defelction Electrostatic Actuator for Optical Switching Applications.” pp. 1-4. Presented at Hilton Head 2000.
Laor, Herzel, “Construction and Performance of a 576×576 Single-Stage OXC,” LEOS. 3 pages. Nov. 8, 1999.
Laor, Herzel, “Performance of a 576×576 Optical Cross Connect.” NFOEC, pp. 1-5. Sep. 26, 1999.
Lee, Sangwoo, et al., “The Surface/Bulk Micromachining (SBM) Process: A New Method for Fabricating Released MEMS in Signle Crystal Silicon.” Journal of Mocroelectromechanical Systems, Dec. 1999.
Milanovic, Veljko, “Optical MEMS for Optical Communications—Trends and Developments.” Adriatic Research Institute. pp. 2-6. Dec. 2001.
Nee, Jocelyn T., et al., “Lightwave, Optically Flat Micromirrors for Fast Beam Steering.”. Presented at IEEE/LEOS Optical MEMS Conference in Kauai, Hawaii. 2 pages. Aug. 2000.
Tien, Norman C. et al., “MEMS Actuators for Silicon Micro-Optical Elements.” Proceedings of SPIE vol. 4178. pp. 256-267. 2000.
Bezuk, Steve, PH.D., “Flip Chip Challenges.” HD Magazine. 6 pages. Feb. 2000.
Chen, YiJian, “Control and Shape DEsign of an Electrically-Damped Comb Drive for Digital Switches.” MOEMS and Miniaturized Systems. Proceedings of SPIE, vol. 4178. pp. 387.
Dawson, J.M. et al., “MEMS Feedbach Control Using Through-Wafer Optical Device Monitoring.” Proc. of SPIE vol. 4178, MOEMS and Miniaturized Systems. Sep. 2000.
Dhillon Parvinder
Novotny Vlad J.
Active Optical Networks, Inc.
Behiel Arthur J.
Bovernick Rodney
Silicon Edge Law Group LLP
Stahl M. J.
LandOfFree
Methods for forming an array of MEMS optical elements does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods for forming an array of MEMS optical elements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods for forming an array of MEMS optical elements will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3768655