Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2005-09-13
2005-09-13
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S187000, C310S312000
Reexamination Certificate
active
06943648
ABSTRACT:
A method of forming a tuned resonator structure by first forming a base resonator structure that comprises a trimming layer on a resonator structure, wherein the trimming layer comprises at least one first low loss acoustic layer on the resonator structure, and at least one second low loss acoustic layer on the first low loss acoustic layer. Then, a “tuned” resonator structure is formed by measuring the frequency of the base resonator structure and removing the number of each of the two different low loss acoustic layers determined to be necessary to achieve the targeted frequency of the base resonator structure, thus improving the frequency control, reliability and performance of the resonating structure.
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patent: 2002/0189062 (2002-12-01), Lin et al.
patent: 11-346137 (1999-12-01), None
G.D. Mansfeld, et al., “Acoustic HBAR Spectroscopy of Metal (W, Ti, Mo, Al) Thin Films”, 2001 IEEE Ultrasonics Symposium, Oct. 2001, pp. 415-418.
Ma Qing
Maiz Jose
Rao Valluri
Wang Li-Peng
Ortiz Kathy J.
Summons Barbara
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