Methods for fabricating three dimensional anisotropic thin...

Details Methods for fabricating three dimensional anisotropic thin... Methods for fabricating three dimensional anisotropic thin...

2006-02-14

2006-02-14

Lee, Hsien-Ming (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

C438S605000, C438S679000, C438S680000, C438S681000, C438S761000

Reexamination Certificate

active

06998331

ABSTRACT:
A three dimensional structure comprising at least two materials capable of being deposited by vapor deposition. The structure is fabricated by the controlled vapor deposition of the materials onto a substrate.

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