Methods for distributing a random variable using...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement

Reexamination Certificate

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C702S182000, C716S030000, C716S030000

Reexamination Certificate

active

07844418

ABSTRACT:
Methods for distributing a random variable by spatial interpolation with statistical corrections. The method includes assigning a numerical value of the random variable at each vertex of an array of equilateral triangles formed in a planar coordinate frame and defining a plurality of test points at respective spatial locations in the planar coordinate frame that are bounded by the array of equilateral triangles. A numerical value of the random variable is distributed at each of the test points by spatial interpolation from one or more of the numerical values of the random variable assigned at each vertex of the array of equilateral triangles. The method further includes adjusting the numerical value of the random variable distributed at each of the test points with a respective correction factor.

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Carlen, et al. “Statistical Model for Spatial Correlation in Thin Film Deposition and Reactive Growth”, IEEE Transactions on Semiconductor Manufacturing, vol. 11, No. 3, Aug. 1998, pp. 511-521.

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