Combinatorial chemistry technology: method – library – apparatus – Method of creating a library
Reexamination Certificate
2006-02-10
2011-12-27
Smith, Zandra (Department: 2822)
Combinatorial chemistry technology: method, library, apparatus
Method of creating a library
C438S478000, C438S493000
Reexamination Certificate
active
08084400
ABSTRACT:
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
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Intermolecular, Inc.
Niesz Jamie C
Smith Zandra
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