Methods for determining tool assignment preference and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

11184793

ABSTRACT:
A method for determining tool assignment preference applied to a semiconductor manufacturing system. At least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools are provided. Demand moves provided by the first and second semiconductor processes are calculated. Assignment preferences of the first and second tools are determined using a statistical method. The statistical method is a two-step data feedback method, comprising the steps of, in the first step, calculating assignment preferences of tools without setting assignment preferences, and, in the second step, assigning assignment preferences to the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.

REFERENCES:
patent: 4994980 (1991-02-01), Lee et al.
patent: 5258915 (1993-11-01), Billington et al.
patent: 6470231 (2002-10-01), Yang et al.
patent: 6920366 (2005-07-01), Luh et al.
patent: 7043320 (2006-05-01), Roumeliotis et al.
patent: 7130707 (2006-10-01), Chao et al.
patent: 2003/0050817 (2003-03-01), Cargille et al.
patent: 2005/0108072 (2005-05-01), Retsina
patent: 2005/0137732 (2005-06-01), Chao et al.
patent: 2005/0182596 (2005-08-01), Chang
patent: 2005/0234578 (2005-10-01), Liu et al.
patent: 2007/0073431 (2007-03-01), Roumeliotis et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Methods for determining tool assignment preference and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods for determining tool assignment preference and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods for determining tool assignment preference and... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3865559

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.