Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-12-11
2007-12-11
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S292000, C359S298000
Reexamination Certificate
active
10167361
ABSTRACT:
A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
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Chen Hung Nan
Chiang Steve
Dehlinger Dietrich
Duboc Robert M.
Grobelny Thomas J.
Brady III Wade James
Mack Ricky
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
Thomas Brandi
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