Electrolysis: processes – compositions used therein – and methods – Electrolytic analysis or testing
Reissue Patent
2006-01-10
2006-01-10
Noguerola, Alex (Department: 1753)
Electrolysis: processes, compositions used therein, and methods
Electrolytic analysis or testing
C204S412000, C204S432000, C204S434000
Reissue Patent
active
RE038931
ABSTRACT:
A method for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth in which the electroplating solution includes one or more constituents whose by-products skew an initial electrical response to an energy input of the electroanalytical technique. The method comprises a first step in which an electroanalytical measurement cycle of the target constituent is initiated by providing an energy input to a pair of electrodes disposed in the electroplating solution. The energy input to the pair of electrodes is provided for at least a predetermined time period corresponding to a time period in which the electroanalytical measurement cycle reaches a steady-state condition. In a subsequent step, an electroanalytical measurement of the energy output of the electroanalytical technique is taken after the electroanalytical measurement cycle has reached the steady-state condition. The electroanalytical measurement is then used to determine an amount of the target constituent in the electroplating solution. An automatic dosing system that includes the foregoing method and/or one or more known electroanalytical techniques in adelete-start id="DEL-S-00001" date="20060110" ?closedelete-end id="DEL-S-00001" ?insert-start id="INS-S-00001" date="20060110" ?closedinsert-end id="INS-S-00001" ?-loop system is also set forth.
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Carpenter Bradley C.
Graham Lyndon W.
Lindberg Fredrick A.
Ritzdorf Thomas L.
Taylor Thomas C.
Christensen O'Connor Johnson & Kindness PLLC
Noguerola Alex
Semitool Inc.
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