Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2007-09-25
2007-09-25
Del Cotto, Gregory R. (Department: 1751)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
C134S034000, C510S175000, C510S176000, C510S255000, C510S258000, C510S264000, C510S499000, C510S500000
Reexamination Certificate
active
11450291
ABSTRACT:
The present invention relates to methods and compositions for treating a surface of a substrate by foam technology that includes at least one treatment chemical. The invention more particularly relates to the removal of undesired matter from the surface of substrates with small features, where such undesired matter may comprise organic and inorganic compounds such as particles, films from photoresist material, and traces of any other impurities such as metals deposited during planarization or etching. A method according to the present invention for treating a surface of a substrate comprises generating a foam from a liquid composition, wherein the liquid composition comprises a gas; a surfactant; and at least one component selected from the group consisting of a fluoride, a hydroxylamine, an amine and periodic acid; contacting the foam with the surface of a substrate; and, removing the undesired matter from the surface of the substrate.
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Cernat Mihaela
Patel Bakul P.
Small Robert J.
Del Cotto Gregory R.
EKC Technology, Inc.
Morgan & Lewis & Bockius, LLP
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