Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2007-05-16
2009-08-25
Mc Ginty, Douglas (Department: 1796)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C510S176000, C438S008000, C438S494000, C438S745000, C438S752000, C438S753000, C438S689000, C134S001300, C134S041000, C134S042000
Reexamination Certificate
active
07579309
ABSTRACT:
The present invention relates to a method for characterizing defects on silicon surfaces, such as silicon wafers, a method for treating silicon surfaces with an etching solution, and an etching solution to be employed in the treating and defect characterization of such silicon wafer surfaces.
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Abbadie Alexandra
Kolbesen Bernd
Maehliss Jochen
Ginty Douglas Mc
S.O.I.Tec Silicon on Insulator Technologies
Winston & Strawn LLP
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