Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate
2006-05-31
2010-02-16
Garber, Charles D (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Optical characteristic sensed
Reexamination Certificate
active
07662649
ABSTRACT:
The invention includes deposition apparatuses having reflectors with rugged reflective surfaces configured to disperse light reflected therefrom, and/or having dispersers between lamps and a substrate. The invention also includes optical methods for utilization within a deposition apparatus for assessing the alignment of a substrate within the apparatus and/or for assessing the thickness of a layer of material deposited within the apparatus.
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Blomiley Eric R.
Dando Ross S.
Drewes Joel A.
Ramaswamy Nirmal
Garber Charles D
Micro)n Technology, Inc.
Stevenson André C
Wells St. John P.S.
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