Methods for analyzing critical defects in analog integrated...

Data processing: measuring – calibrating – or testing – Testing system – Of circuit

Reexamination Certificate

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C702S118000

Reexamination Certificate

active

07415378

ABSTRACT:
The present invention provides a method for analyzing critical defects in analog integrated circuits. The method for analyzing critical defects, among other possible steps, may include fault testing a power field effect transistor (120) portion of an analog integrated circuit (115) to obtain electrical failure data. The method may further include performing an in-line optical inspection of the analog integrated circuit (115) to obtain physical defect data, and correlating the electrical failure data and physical defect data to analyze critical defects.

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KLA-Tencor Website; Assorted archived pages of Dec. 2004.

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