Methods, complexes, and systems for forming metal-containing fil

Details Methods, complexes, and systems for forming metal-containing fil Methods, complexes, and systems for forming metal-containing fil

1998-08-25

2000-02-01

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Aluminum containing

556 1, 534 15, 568 1, 568 3, C07F 506, C07F 502

Patent

active

060205113

ABSTRACT:
A method of forming a film on a substrate using, Group III metal complexes, including Group IIIA metals and Group IIIB metals, which include the lanthanides. The complexes and methods are particularly suitable for the preparation of semiconductor structures using chemical vapor deposition techniques and systems.

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