Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
2011-08-02
2011-08-02
Rose, Robert (Department: 3727)
Abrading
Precision device or process - or with condition responsive...
By optical sensor
C451S041000
Reexamination Certificate
active
07988529
ABSTRACT:
Methods and apparatus for controlling the removal of material from microfeature workpieces in abrasive removal processes. An embodiment of such a method comprises irradiating a periodic structure of the workpiece and obtaining an intensity distribution of radiation returning from the periodic structure. The workpiece can be irradiated with a wide spectrum of wavelengths (e.g., white light), or the workpiece can be irradiated with a laser or lamp at specific wavelengths. The intensity distribution can be an image or other signal from which a dimension or other physical parameter of the periodic structure can be determined. For example, the intensity distribution can be an intensity signal of radiation returning from the workpiece in a selected bandwidth (e.g., 200 nm-900 nm) or an image of a diffraction pattern of radiation that has been scattered by the periodic structure. The method further includes outputting a control signal based on the obtained intensity distribution. For example, the control signal can be an endpoint signal indicating the actual endpoint of the abrasive removal process.
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Chandrasekaran Nagasubramaniyan
Hofmann James J.
Kothari Rajshree
Sabde Gundu M.
Micro)n Technology, Inc.
Perkins Coie LLP
Rose Robert
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