Methods and systems to detect defects in an end effector for...

Details Methods and systems to detect defects in an end effector for... Methods and systems to detect defects in an end effector for...

2005-07-19

2005-07-19

Williams, Hezron (Department: 2856)

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

C451S056000, C451S287000, C438S014000, C134S010000

Reexamination Certificate

active

06918301

ABSTRACT:
Methods and systems to detect defects in an end effector for conditioning polishing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, a method of detecting defects in an end effector includes applying energy to a contact element of the end effector and determining a natural frequency of the contact element. Applying energy can include transmitting ultrasonic energy from a transducer to the contact element. The method can further include comparing the natural frequency of the contact element to a predetermined frequency limit to detect a defect. In another embodiment, a system to detect defects includes a conditioner having an end effector with a contact element, a transducer for applying energy to the contact element, and a controller operatively coupled to the conditioner and the transducer. The controller has a computer-readable medium containing instructions to perform the above-mentioned method.

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