Methods and systems of enhancing stepper alignment signals...

Details Methods and systems of enhancing stepper alignment signals... Methods and systems of enhancing stepper alignment signals...

2004-08-26

2008-11-11

Nguyen, Tuan H (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C438S401000

Reexamination Certificate

active

07449790

ABSTRACT:
Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.

REFERENCES:
patent: 5869383 (1999-02-01), Chien et al.
patent: 5904563 (1999-05-01), Yu
patent: 6004473 (1999-12-01), Hsiao et al.
patent: 6028750 (2000-02-01), Ohtsubo
patent: 6054361 (2000-04-01), Tan et al.
patent: 6076252 (2000-06-01), Sasaki
patent: 6242816 (2001-06-01), Stanton et al.
patent: 6248484 (2001-06-01), Sajan et al.
patent: 6259585 (2001-07-01), Sasaki et al.
patent: 6271602 (2001-08-01), Ackmann et al.
patent: 6399285 (2002-06-01), Kamijima
patent: 6420791 (2002-07-01), Huang et al.
patent: 6451668 (2002-09-01), Neumeier et al.
patent: 6888260 (2005-05-01), Carpi et al.
patent: 2002/0025588 (2002-02-01), Shiraishi
patent: 2002/0192926 (2002-12-01), Scroeder et al.
patent: 2003/0071369 (2003-04-01), Huang et al.
patent: 2003/0127751 (2003-07-01), Yamada et al.
patent: 1030220 (1989-02-01), None
patent: 1117027 (1989-05-01), None
patent: 1206347 (1989-08-01), None
patent: 5143932 (1993-06-01), None
patent: 7176018 (1995-07-01), None
patent: 8203029 (1996-08-01), None
patent: 10133397 (1998-05-01), None
patent: 10162316 (1998-06-01), None
patent: 2000173018 (2000-06-01), None
patent: 2002367111 (2002-12-01), None
patent: 2003140366 (2003-05-01), None

Affiliated with

Also associated with

Rating

Methods and systems of enhancing stepper alignment signals... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods and systems of enhancing stepper alignment signals..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and systems of enhancing stepper alignment signals... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4050279