Methods and systems for thermal-based laser processing a...

Details Methods and systems for thermal-based laser processing a... Methods and systems for thermal-based laser processing a...

2008-06-03

2008-06-03

Pham, Hai C (Department: 2861)

Incremental printing of symbolic information

Light or beam marking apparatus or processes

C219S121680

Reexamination Certificate

active

07382389

ABSTRACT:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

REFERENCES:
patent: 3806829 (1974-04-01), Duston et al.
patent: 3869210 (1975-03-01), Fletcher et al.
patent: 4044222 (1977-08-01), Kestenbaum
patent: 4114018 (1978-09-01), Allmen et al.
patent: 4399345 (1983-08-01), Lapham et al.
patent: 4414059 (1983-11-01), Blum et al.
patent: 4467172 (1984-08-01), Ehrenwald et al.
patent: 4483005 (1984-11-01), Smart
patent: 4532402 (1985-07-01), Overbeck
patent: 4602852 (1986-07-01), Moroz
patent: 4646308 (1987-02-01), Kafka et al.
patent: 4742522 (1988-05-01), Linford
patent: 4780177 (1988-10-01), Wojnarowski et al.
patent: 4826785 (1989-05-01), McClure et al.
patent: 4827325 (1989-05-01), Or-Bach et al.
patent: 4878222 (1989-10-01), Lawrence
patent: 4914663 (1990-04-01), Basu et al.
patent: 4932031 (1990-06-01), Alfano et al.
patent: 4935801 (1990-06-01), McClure et al.
patent: 5005946 (1991-04-01), Brandstetter
patent: 5021362 (1991-06-01), Chlipala
patent: 5034951 (1991-07-01), Edelstein et al.
patent: 5042040 (1991-08-01), Harvey et al.
patent: 5059764 (1991-10-01), Baer
patent: 5175664 (1992-12-01), Diels et al.
patent: 5197074 (1993-03-01), Emmons, Jr. et al.
patent: 5201137 (1993-04-01), Burgdorf
patent: 5208437 (1993-05-01), Miyauchi et al.
patent: 5236551 (1993-08-01), Pan
patent: 5265114 (1993-11-01), Sun et al.
patent: 5268911 (1993-12-01), Young
patent: 5280491 (1994-01-01), Lai
patent: 5293025 (1994-03-01), Wang
patent: 5294567 (1994-03-01), Dorfman et al.
patent: 5300756 (1994-04-01), Cordingley
patent: 5329152 (1994-07-01), Janai et al.
patent: 5400350 (1995-03-01), Galvanauskas
patent: 5451785 (1995-09-01), Faris
patent: 5473624 (1995-12-01), Sun
patent: 5475527 (1995-12-01), Hackel et al.
patent: 5513194 (1996-04-01), Tamura et al.
patent: 5520679 (1996-05-01), Lin
patent: 5539764 (1996-07-01), Shields et al.
patent: 5558789 (1996-09-01), Singh
patent: 5569398 (1996-10-01), Sun et al.
patent: 5586138 (1996-12-01), Yokogama
patent: 5592327 (1997-01-01), Gabl et al.
patent: 5611946 (1997-03-01), Leong et al.
patent: 5627848 (1997-05-01), Fermann et al.
patent: 5653900 (1997-08-01), Clement et al.
patent: 5654998 (1997-08-01), Turcu et al.
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5662822 (1997-09-01), Tada et al.
patent: 5669979 (1997-09-01), Elliott et al.
patent: 5685995 (1997-11-01), Sun et al.
patent: 5689519 (1997-11-01), Fermann et al.
patent: 5694408 (1997-12-01), Bott et al.
patent: 5720894 (1998-02-01), Neev et al.
patent: 5725914 (1998-03-01), Opower
patent: 5739590 (1998-04-01), Sakamoto et al.
patent: 5742634 (1998-04-01), Rieger et al.
patent: 5745284 (1998-04-01), Goldberg et al.
patent: 5751585 (1998-05-01), Cutler et al.
patent: 5756924 (1998-05-01), Early
patent: 5759428 (1998-06-01), Balamane et al.
patent: 5786560 (1998-07-01), Tatah et al.
patent: 5790574 (1998-08-01), Rieger et al.
patent: 5811751 (1998-09-01), Leong et al.
patent: 5818630 (1998-10-01), Fermann et al.
patent: 5837962 (1998-11-01), Overbeck
patent: 5841099 (1998-11-01), Owen et al.
patent: 5847960 (1998-12-01), Cutler et al.
patent: 5848080 (1998-12-01), Dahm
patent: 5854805 (1998-12-01), Reid et al.
patent: 5864430 (1999-01-01), Dickey et al.
patent: 5880877 (1999-03-01), Fermann et al.
patent: 5920668 (1999-07-01), Uehara et al.
patent: 5923686 (1999-07-01), Fermann et al.
patent: 5925271 (1999-07-01), Pollack et al.
patent: 5940418 (1999-08-01), Shields
patent: 5953354 (1999-09-01), Staver et al.
patent: 5956354 (1999-09-01), Yan
patent: 5974060 (1999-10-01), Byren et al.
patent: 5987049 (1999-11-01), Weingarten et al.
patent: 5998759 (1999-12-01), Smart
patent: 6025256 (2000-02-01), Swenson et al.
patent: 6034975 (2000-03-01), Harter et al.
patent: 6057180 (2000-05-01), Sun et al.
patent: 6072811 (2000-06-01), Fermann et al.
patent: 6103992 (2000-08-01), Noddin
patent: 6144118 (2000-11-01), Cahill et al.
patent: 6150630 (2000-11-01), Perry
patent: 6151338 (2000-11-01), Grubb et al.
patent: 6156030 (2000-12-01), Neev
patent: 6169014 (2001-01-01), McCulloch
patent: 6172325 (2001-01-01), Baird et al.
patent: 6181728 (2001-01-01), Cordingley et al.
patent: 6191486 (2001-02-01), Bernstein
patent: 6208458 (2001-03-01), Galvanauskas et al.
patent: 6210401 (2001-04-01), Lai
patent: 6211485 (2001-04-01), Burgess
patent: 6239406 (2001-05-01), Onoma et al.
patent: 6252195 (2001-06-01), Mosavi et al.
patent: 6268586 (2001-07-01), Stuart et al.
patent: 6281471 (2001-08-01), Smart
patent: 6285002 (2001-09-01), Ngol et al.
patent: 6297541 (2001-10-01), Ema et al.
patent: 6300590 (2001-10-01), Lauer et al.
patent: 6324195 (2001-11-01), Suzuki et al.
patent: 6339604 (2002-01-01), Smart
patent: 6340806 (2002-01-01), Smart et al.
patent: 6341029 (2002-01-01), Fillion et al.
patent: RE37585 (2002-03-01), Mourou et al.
patent: 6407363 (2002-06-01), Dunsky et al.
patent: 6421166 (2002-07-01), Velsko et al.
patent: 6433301 (2002-08-01), Dunsky et al.
patent: 6433306 (2002-08-01), Grubb et al.
patent: 6441337 (2002-08-01), Isaji et al.
patent: 6462306 (2002-10-01), Kitai et al.
patent: 6462307 (2002-10-01), Henning et al.
patent: 6472295 (2002-10-01), Morris et al.
patent: 6483071 (2002-11-01), Hunter et al.
patent: 6541731 (2003-04-01), Mead et al.
patent: 6552301 (2003-04-01), Herman et al.
patent: 6574250 (2003-06-01), Sun et al.
patent: 6580055 (2003-06-01), Iso
patent: 6621040 (2003-09-01), Perry et al.
patent: 6664498 (2003-12-01), Forsman et al.
patent: 6689985 (2004-02-01), Lipman et al.
patent: 6710289 (2004-03-01), Iso
patent: 6717101 (2004-04-01), Morris et al.
patent: 6727458 (2004-04-01), Smart
patent: 6849824 (2005-02-01), Arai
patent: 6875951 (2005-04-01), Sakamoto et al.
patent: 6879605 (2005-04-01), Kyusho et al.
patent: 6901090 (2005-05-01), Ohtsuki
patent: 6947123 (2005-09-01), Ohtsuki
patent: 6951995 (2005-10-01), Couch
patent: 6972268 (2005-12-01), Ehrmann et al.
patent: 6989508 (2006-01-01), Ehrmann et al.
patent: 7050208 (2006-05-01), Overbeck
patent: 2001/0009250 (2001-07-01), Herman et al.
patent: 2001/0022673 (2001-09-01), Sato et al.
patent: 2001/0050931 (2001-12-01), Iso
patent: 2002/0003130 (2002-01-01), Sun et al.
patent: 2002/0005396 (2002-01-01), Baird et al.
patent: 2002/0009843 (2002-01-01), Kyusho et al.
patent: 2002/0063361 (2002-05-01), Fahey
patent: 2002/0131693 (2002-09-01), Islam et al.
patent: 2003/0042230 (2003-03-01), Gross et al.
patent: 2003/0058440 (2003-03-01), Scott et al.
patent: 2003/0151053 (2003-08-01), Sun et al.
patent: 2003/0222324 (2003-12-01), Sun et al.
patent: 2004/0057475 (2004-03-01), Frankel et al.
patent: 2004/0228004 (2004-11-01), Sercel et al.
patent: 2005/0041702 (2005-02-01), Fermann et al.
patent: 0 367 507 (1990-05-01), None
patent: 0902 474 (1999-03-01), None
patent: 2 331 038 (1999-05-01), None
patent: 55-081095 (1980-06-01), None
patent: 56-143434 (1981-11-01), None
patent: 62-086839 (1987-04-01), None
patent: 63-136545 (1988-06-01), None
patent: 63-264286 (1988-11-01), None
patent: 63-302503 (1988-12-01), None
patent: 64-044295 (1989-02-01), None
patent: 02-089586 (1989-11-01), None
patent: 01-289586 (1990-03-01), None
patent: 02-063103 (1990-03-01), None
patent: 03-297588 (1991-12-01), None
patent: 04-006599 (1992-01-01), None
patent: 04-098801 (1992-03-0

Affiliated with

Also associated with

Rating

Methods and systems for thermal-based laser processing a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods and systems for thermal-based laser processing a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and systems for thermal-based laser processing a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2806634