Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-05-27
2008-05-27
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
10679617
ABSTRACT:
Methods and systems for inspecting a reticle are provided. In an embodiment, a system may include an inspection subsystem configured to form a first aerial image of the reticle. The first aerial image may be used to detect defects on the reticle. The system may also include a review subsystem coupled to the inspection subsystem. For example, the inspection and review subsystems may have common optics, separate optics and a common stage, or separate stages and a common handler. The review subsystem may be configured to form a second aerial image of the reticle. The second aerial image may be used to analyze the defects. In another embodiment, the system may include an image computer configured to receive image data from the inspection and review subsystems representing the first and second aerial images. The image computer may also be configured to perform one or more functions on the image data.
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Alles David
Stokowski Stan
Baker & McKenzie LLP
KLA-Tencor Technologies Corp.
Rosenberger Richard A.
LandOfFree
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