Methods and systems for removing protective films from...

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

Reexamination Certificate

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C156S345420, C156S583200, C438S976000

Reexamination Certificate

active

07846288

ABSTRACT:
Methods and systems for removing protective films from microfeature workpieces are disclosed herein. One particular embodiment of such a method comprises separating at least a portion of a protective tape from a workpiece to which the protective tape is attached with a separator configured to drive against an interface between the protective tape and the workpiece. The method further includes engaging the portion of the protective tape detached from the workpiece with a removal system.

REFERENCES:
patent: 4631103 (1986-12-01), Ametani
patent: 4867836 (1989-09-01), Hamamura et al.
patent: 5344521 (1994-09-01), Ohsaki
patent: 5358591 (1994-10-01), Candore
patent: 6500298 (2002-12-01), Wright et al.
patent: 2004/0126923 (2004-07-01), Benson

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