Methods and systems for purifying gases

Details Methods and systems for purifying gases Methods and systems for purifying gases

2007-03-29

2010-06-22

Lawrence, Frank M (Department: 1797)

Gas separation: apparatus

Solid sorbent apparatus

With means regenerating solid sorbent

C096S152000

Reexamination Certificate

active

07740690

ABSTRACT:
The present invention relates to methods and systems for purifying gases, such as for example semiconductor process gases. The invention more particularly relates to fluid purification methods and systems having improved heat transfer capabilities and controls such that the purified fluid produced from the process contains reduced impurity levels and/or exhibits more uniform concentrations within the final product. In another aspect of the invention, the activation time for adsorbent beds used in such processes and systems can be reduced.

REFERENCES:
patent: 2989383 (1961-06-01), Miller
patent: 3298527 (1967-01-01), Wright
patent: 4026680 (1977-05-01), Collins
patent: 4165972 (1979-08-01), Iles et al.
patent: 4444727 (1984-04-01), Yanagihara et al.
patent: 4582516 (1986-04-01), Kadi
patent: 5169413 (1992-12-01), Leavitt
patent: 5213593 (1993-05-01), White, Jr.
patent: 5268022 (1993-12-01), Garrett et al.
patent: 5298054 (1994-03-01), Malik
patent: 5441716 (1995-08-01), Rockenfeller
patent: 5837027 (1998-11-01), Olander et al.
patent: 5861050 (1999-01-01), Pittel et al.
patent: 5917140 (1999-06-01), Tom
patent: 6500238 (2002-12-01), Brandes et al.
patent: 6576138 (2003-06-01), Sateria et al.
patent: 6749819 (2004-06-01), Otsuka et al.
patent: 2002/0100369 (2002-08-01), Kuriiwa et al.
Weiner, “Drying Gases and Liquids”, Chem. Eng. (1974), pp. 92-101.
Menard et al., “Activated Carbon Monolith of High Thermal Conductivity for Adsorption Processes Improvement—Part A:Adsorption Step”, Chem. Eng. & Proc., (2005), p. 1029-1038.
Bonjour et al., “Temperature Swing Adsorption Process with Indirect Cooling and Heating”, Ind. Eng. Chem. Res., (2002), pp. 5802-5811, 41.

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