Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2008-01-01
2008-01-01
Monbleau, Davienne (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559290, C250S548000, C356S614000, C356S620000, C438S128000, C438S132000, C219S121600, C219S121680, C219S121690, C219S121850
Reexamination Certificate
active
11213329
ABSTRACT:
A method and system position a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. The method generates a metrology laser beam and propagates the metrology laser beam along a propagation path to a metrology laser beam spot on or near a structure to be selectively processed. The method detects a reflection of the metrology laser beam from the structure, thereby generating a reflection signal, and determining, based on the reflection signal, a position of the metrology laser beam spot relative to the structure.
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Electro Scientific Industries Inc.
Monbleau Davienne
Stoel Rives LLP
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