Electric heating – Metal heating – By arc
Reexamination Certificate
2011-06-21
2011-06-21
Heinrich, Samuel M (Department: 3742)
Electric heating
Metal heating
By arc
C219S121680, C219S121690, C438S795000
Reexamination Certificate
active
07964819
ABSTRACT:
Various methods and systems measure, determine, or align a position of a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. The various methods and systems utilize those structures themselves to perform the measurement, determination, or alignment.
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Electro Scientific Industries Inc.
Heinrich Samuel M
Stoel Rives LLP
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