Methods and systems for optical inspection of surfaces based...

Details Methods and systems for optical inspection of surfaces based... Methods and systems for optical inspection of surfaces based...

2008-03-11

2008-03-11

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C356S237400

Reexamination Certificate

active

10327534

ABSTRACT:
A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.

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