Methods and systems for intensity modeling including...

Details Methods and systems for intensity modeling including... Methods and systems for intensity modeling including...

2011-07-05

2011-07-05

Shah, Kamini S (Department: 2128)

Data processing: structural design, modeling, simulation, and em

Modeling by mathematical expression

C716S030000, C355S067000

Reexamination Certificate

active

07974819

ABSTRACT:
Embodiments of the present invention provide computer readable media encoded with executable instructions for modeling an intensity profile at a surface illuminated by an illumination source through a mask. Further embodiments provide methods for correcting a mask pattern and methods for selecting an illumination source. Still further embodiments provide masks and integrated circuits produced using a model of the illumination source. Embodiments of the present invention take into account the polarization of the illumination source and are able to model the effect of polarization on the resultant intensity profile.

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