Methods and systems for inspecting a specimen using light...

Details Methods and systems for inspecting a specimen using light... Methods and systems for inspecting a specimen using light...

2007-12-04

2007-12-04

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

Reexamination Certificate

active

10719347

ABSTRACT:
Methods and systems for inspecting a specimen are provided. One method includes directing ultraviolet light to a specimen. The method also includes detecting light scattered from the specimen having a selected wavelength range. In addition, the method includes detecting features, defects, or light scattering properties of the specimen using signals representative of the detected light. One inspection system includes an illumination subsystem configured to direct ultraviolet light to a specimen. The system also includes a channel configured to detect light scattered from the specimen having a selected wavelength range. In addition, the system includes a processor configured to detect features, defects, or light scattering properties of the specimen using signals that are representative of the detected light.

REFERENCES:
patent: 4556903 (1985-12-01), Blitchington et al.
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 5717518 (1998-02-01), Shafer et al.
patent: 5771094 (1998-06-01), Carter et al.
patent: 5936726 (1999-08-01), Takeda et al.
patent: 5956174 (1999-09-01), Shafer et al.
patent: 6133576 (2000-10-01), Shafer et al.
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6271916 (2001-08-01), Marxer et al.
patent: 6313467 (2001-11-01), Shafer et al.
patent: RE37740 (2002-06-01), Chadwick et al.
patent: 6538730 (2003-03-01), Vaez-Iravani et al.
patent: 6597000 (2003-07-01), Stern
patent: 6618134 (2003-09-01), Vaez-Iravani et al.
patent: 6657714 (2003-12-01), Almogy et al.
patent: 6914670 (2005-07-01), Almogy et al.
patent: 2002/0054291 (2002-05-01), Tsai et al.
patent: 2002/0093648 (2002-07-01), Nikoonahad et al.
patent: 2002/0105636 (2002-08-01), Okawauchi
patent: 2002/0109110 (2002-08-01), Some et al.
patent: 2003/0058433 (2003-03-01), Almogy et al.
patent: 2005/0073686 (2005-04-01), Roth et al.

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