Methods and systems for improved boundary contrast

Details Methods and systems for improved boundary contrast Methods and systems for improved boundary contrast

2006-09-12

2006-09-12

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S225100, C430S394000

Reexamination Certificate

active

07106490

ABSTRACT:
The present invention relates to methods and systems that define feature boundaries in a radiation sensitive medium on a workpiece using a diffraction-type micromirror array, extending to production of patterns and structures on a semiconductor substrate. Workpieces include lithographic masks, integrated circuits and other electronic and optical devices. Particular aspects of the present invention are described in the claims, specification and drawings.

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