Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate
2005-05-03
2005-05-03
Lee, Eddie (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
C257S762000, C257S750000, C257S632000, C257S643000, C257S644000, C257S650000, C257S774000
Reexamination Certificate
active
06888224
ABSTRACT:
Low-k dielectric materials have desirable insulating characteristics for use in insulating sub micron conductors in semiconductor devices. However, certain physical and material characteristics of the low-k dielectric materials make them difficult to work with. More particularly, the soft, porous, leakage-prone characteristics of low-k materials makes it difficult to accommodate electrical contacts for electrical probing to conductors covered by such materials. The present invention provides methods and structures for facilitating the electrical probing of semiconductor device conductors insulated by overlying low-k layers of dielectric material.
REFERENCES:
patent: 6514881 (2003-02-01), Coffman
Kane Terence Lawrence
Tenney Michael P.
International Business Machines - Corporation
Lee Eddie
Magee Thomas
Ulrich Lisa J.
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