Methods and systems for delivering an ultra-pure gas to a point

Details Methods and systems for delivering an ultra-pure gas to a point Methods and systems for delivering an ultra-pure gas to a point

1997-09-16

1999-04-20

Capossela, Ronald

Refrigeration

Storage of solidified or liquified gas

Liquified gas transferred as liquid

62606, F17C 902

Patent

active

058947426

ABSTRACT:
Methods and systems of delivering ultra-high purity gas to a point of use are claimed and described. The methods include providing a source of ultra-high purity liquid (the source preferably at a pressure and temperature sufficient to maintain the liquid in substantially the liquid phase); transporting (preferably via pressure in the source alone) the ultra-high purity liquid from the source to one or more means to effect a phase change of the ultra-high purity liquid to an ultra-high purity gas; effecting a phase change (preferably at or near equilibrium vaporization conditions) of the ultra-high purity liquid to form an ultra-high purity gas in the one or more means to effect the phase change; and routing the ultra-high purity gas from the means to effect the phase change to a point of use (preferably with no intermediate, potentially impurity-generating media between the means to effect the phase change and the point of use other than ultra-clean conduit).

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Chowdhury et al.; Developing a Bulk Distribution System for High-Purity Hydrogen Chloride; Micro, Sep. 1995; pp. 33-37.

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