Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate
2006-09-20
2008-10-21
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
With plural diverse test or art
Reexamination Certificate
active
07440086
ABSTRACT:
Methods and systems for creating a recipe for a defect review process are provided. One method includes determining an identity of a specimen on which the defect review process will be performed. The method also includes identifying inspection results for the specimen based on the identity. In addition, the method includes creating the recipe for the defect review process based on the inspection results. One system includes a sensor configured to generate output responsive to an identity of a specimen on which the defect review process will be performed. The system also includes a processor configured to determine the identity of the specimen using the output, to identify inspection results for the specimen based on the identity, and to create the recipe for the defect review process based on the inspection results.
REFERENCES:
patent: 6259960 (2001-07-01), Inokuchi
patent: 7020582 (2006-03-01), Dicosola et al.
patent: 2004/0158409 (2004-08-01), Teshima et al.
Borowicz S. Mark
Krzeckzowski Kenneth J.
Nasser-Ghodsi Mehran
Akanbi Isiaka O
Baker & McKenzie LLP
Chowdhury Tarifur R.
KLA-Tencor Technologies Corp.
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