Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate
2005-03-15
2005-03-15
Le, N. (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
C324S658000, C324S660000, C324S663000, C324S656000, C324S686000
Reexamination Certificate
active
06867602
ABSTRACT:
Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1and Cx2, and power provided from a voltage source.
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PCT Notification of Transmittal of the International Search Report or the Declaration Date of Mailing: Jun. 15, 2004, PCT/US 03/40742.
Davis Richard A.
Foote Steve R.
Foster Ron
Kirkpatrick, II Richard A.
Fredrick Kris T.
Honeywell International , Inc.
Le N.
Lopez Kermit D.
Ortiz Luis M.
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