Methods and systems for capacitive balancing of relative...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C324S658000, C324S660000, C324S663000, C324S656000, C324S686000

Reexamination Certificate

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06867602

ABSTRACT:
Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1and Cx2, and power provided from a voltage source.

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PCT Notification of Transmittal of the International Search Report or the Declaration Date of Mailing: Jun. 15, 2004, PCT/US 03/40742.

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