Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate
2011-04-26
2011-04-26
Stark, Jarrett J (Department: 2823)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
C257S781000, C257S782000, C257SE21122
Reexamination Certificate
active
07932161
ABSTRACT:
Materials, and methods that use such materials, that are useful for forming chip stacks, chip and wafer bonding and wafer thinning are disclosed. Such methods and materials provide strong bonds while also being readily removed with little or no residues.
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Apanius Chris
Bell Andrew
Neal Phil
Ng Hendra
Shick Robert A.
Promerus LLC
Stark Jarrett J
The Webb Law Firm
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