Methods and configurations for manufacturing hinges for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S224100

Reexamination Certificate

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07746538

ABSTRACT:
An image display system includes an improved hinge for a micro-mirror device composed of a conductive-doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.

REFERENCES:
patent: 6128121 (2000-10-01), Choi et al.
patent: 6914711 (2005-07-01), Novotny et al.
patent: 7183618 (2007-02-01), Ishii
patent: 2004/0061961 (2004-04-01), Valette

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