Methods and compositions for removing metal oxides

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents

Reexamination Certificate

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C134S002000, C134S003000, C134S022100, C134S022110, C134S022120, C134S022180, C134S022190, C134S028000, C134S030000, C134S034000, C134S035000, C134S036000, C134S040000, C134S041000, C134S042000

Reexamination Certificate

active

07611588

ABSTRACT:
The invention relates to methods and compositions for removing metal oxide soils from surfaces. The compositions include an anionic surfactant and a pH adjuster at an acidic pH. In one embodiment, the invention relates to a method of removing a metal oxide soil from a surface by (1) applying a use composition to the surface, the use composition having a pH adjuster in an amount sufficient to provide a use pH at or below 7, an anionic surfactant in an amount to remove a portion of the metal oxide soil, and a carrier, (2) removing the metal oxide soil from the surface with the use composition, and (3) rinsing the surface to remove the use composition and the metal oxide soil.

REFERENCES:
patent: 2790738 (1957-04-01), Alexander
patent: 2861015 (1958-11-01), Simon
patent: 2981609 (1961-04-01), Acker
patent: 3007780 (1961-11-01), Beigay
patent: 3095379 (1963-06-01), Schwartz
patent: 3429824 (1969-02-01), Tate
patent: 3436285 (1969-04-01), Wilkes
patent: 3445937 (1969-05-01), Groves
patent: 3488289 (1970-01-01), Tate
patent: 3547697 (1970-12-01), Frost
patent: 3553015 (1971-01-01), Dohogne
patent: 3580855 (1971-05-01), Mickus
patent: 3660078 (1972-05-01), Yamada
patent: 3690949 (1972-09-01), Ng
patent: 3725224 (1973-04-01), Kendall
patent: 3741747 (1973-06-01), Hamilton
patent: 3749618 (1973-07-01), Fannin
patent: 3754990 (1973-08-01), Teumac
patent: 3761312 (1973-09-01), Entwisle
patent: 3832234 (1974-08-01), Otrhalek et al.
patent: 3887403 (1975-06-01), Coggins
patent: 4013755 (1977-03-01), Weiler
patent: 4038364 (1977-07-01), Lailach
patent: 4083946 (1978-04-01), Schurr
patent: 4098688 (1978-07-01), Nott
patent: 4113588 (1978-09-01), Watanabe
patent: 4116755 (1978-09-01), Coggins
patent: 4137292 (1979-01-01), Tolley
patent: 4174290 (1979-11-01), Leveskis
patent: 4250048 (1981-02-01), Leveskis
patent: 4264418 (1981-04-01), Wood
patent: 4292090 (1981-09-01), Chao
patent: 4314876 (1982-02-01), Kremer
patent: 4331636 (1982-05-01), Svoronos
patent: 4340620 (1982-07-01), Mielsch
patent: 4364908 (1982-12-01), Rahm
patent: 4381249 (1983-04-01), Bouffard
patent: 4414039 (1983-11-01), Thoma
patent: 4430128 (1984-02-01), Freinier
patent: 4441930 (1984-04-01), Baudis
patent: 4470920 (1984-09-01), Leveskis
patent: 4496404 (1985-01-01), King
patent: 4517163 (1985-05-01), Jödden
patent: 4525250 (1985-06-01), Fahrmbacher-Lutz
patent: 4529450 (1985-07-01), Panayappan
patent: 4591391 (1986-05-01), Shimizu
patent: 4599114 (1986-07-01), Atkinson
patent: 4623399 (1986-11-01), Frenier
patent: 4636327 (1987-01-01), Frenier
patent: 4731126 (1988-03-01), Dixit
patent: 4800132 (1989-01-01), Grunwald
patent: 4806259 (1989-02-01), Amjad
patent: 4810405 (1989-03-01), Waller
patent: 4832868 (1989-05-01), Schmid
patent: 4867853 (1989-09-01), Hauffe
patent: 4877482 (1989-10-01), Knapp
patent: 4921629 (1990-05-01), Malihi
patent: 4931102 (1990-06-01), Burke
patent: 5011661 (1991-04-01), Sch{hacek over (a)}fer
patent: 5074972 (1991-12-01), Matz
patent: 5137793 (1992-08-01), Cockrell
patent: 5171459 (1992-12-01), Kaplan
patent: 5215676 (1993-06-01), Stone
patent: 5232619 (1993-08-01), Sue
patent: 5266108 (1993-11-01), Hauck
patent: 5282977 (1994-02-01), Schinkitz
patent: 5290362 (1994-03-01), Sue
patent: 5332433 (1994-07-01), Story
patent: 5338367 (1994-08-01), Henriet
patent: 5411719 (1995-05-01), Hollitt
patent: 5451335 (1995-09-01), Hieatt
patent: 5482174 (1996-01-01), Namiki
patent: 5575863 (1996-11-01), Sala
patent: 5607911 (1997-03-01), Levin et al.
patent: 5609692 (1997-03-01), Johnson et al.
patent: 5662769 (1997-09-01), Schonauer
patent: 5685917 (1997-11-01), Sangeeta
patent: 5763377 (1998-06-01), Dobrez
patent: 5797986 (1998-08-01), Rolando
patent: 5808118 (1998-09-01), Atkinson
patent: 5858463 (1999-01-01), Ogura
patent: 5885364 (1999-03-01), Hieatt et al.
patent: 5993558 (1999-11-01), Webster
patent: 6017505 (2000-01-01), Ziegler
patent: 6060122 (2000-05-01), Rossmaier
patent: 6156129 (2000-12-01), Hlivka et al.
patent: 6210558 (2001-04-01), Demertzis
patent: 6217668 (2001-04-01), Czech
patent: 6241826 (2001-06-01), Dittmer
patent: 6274027 (2001-08-01), Kiya
patent: 6348092 (2002-02-01), Atkinson
patent: 6348440 (2002-02-01), Meskers et al.
patent: 6399540 (2002-06-01), Oki
patent: 6419755 (2002-07-01), Arruda
patent: 6627546 (2003-09-01), Kneer
patent: 6640816 (2003-11-01), Gonzales
patent: 6706122 (2004-03-01), Wijngaard
patent: 6926836 (2005-08-01), Fidoe et al.
patent: 2003/0150613 (2003-08-01), Freiter
patent: 2004/0221870 (2004-11-01), Canoiranzo et al.
patent: 2005/0003091 (2005-01-01), Schoennenbeck
patent: 1074717 (1993-07-01), None
patent: 2757592 (1979-07-01), None
patent: 3030964 (1982-03-01), None
patent: 3123425 (1982-12-01), None
patent: 3226670 (1983-02-01), None
patent: 3203482 (1983-08-01), None
patent: 3217145 (1983-11-01), None
patent: 3223068 (1983-12-01), None
patent: 3301703 (1984-07-01), None
patent: 3320641 (1984-12-01), None
patent: 3412329 (1985-10-01), None
patent: 3531683 (1987-03-01), None
patent: 3740610 (1988-08-01), None
patent: 3910042 (1990-10-01), None
patent: 4101843 (1992-04-01), None
patent: 4110595 (1992-11-01), None
patent: 4123772 (1993-01-01), None
patent: 4339502 (1995-06-01), None
patent: 4419276 (1995-12-01), None
patent: 4218916 (1996-03-01), None
patent: 19506857 (1996-08-01), None
patent: 19521596 (1996-11-01), None
patent: 19530551 (1997-03-01), None
patent: 19636370 (1998-03-01), None
patent: 1983738 (2000-03-01), None
patent: 10005124 (2001-08-01), None
patent: 10026864 (2001-12-01), None
patent: 10049777 (2002-04-01), None
patent: 0040461 (1984-01-01), None
patent: 0104012 (1984-03-01), None
patent: 0072986 (1984-12-01), None
patent: 0086245 (1987-05-01), None
patent: 0299166 (1989-01-01), None
patent: 0414820 (1993-03-01), None
patent: 0276501 (1994-04-01), None
patent: 0592892 (1994-04-01), None
patent: 0475953 (1994-08-01), None
patent: 0415807 (1994-10-01), None
patent: 0388749 (1995-06-01), None
patent: 0506928 (1995-09-01), None
patent: 0547088 (1998-04-01), None
patent: 0717723 (1998-04-01), None
patent: 0849377 (1998-06-01), None
patent: 0759097 (1998-08-01), None
patent: 0636712 (1998-10-01), None
patent: 0654508 (1999-05-01), None
patent: 0817871 (1999-06-01), None
patent: 0909344 (2000-08-01), None
patent: 0769570 (2000-09-01), None
patent: 1142630 (2001-10-01), None
patent: 0960221 (2002-03-01), None
patent: 0964940 (2002-04-01), None
patent: 0922124 (2002-05-01), None
patent: 1211563 (2002-06-01), None
patent: 1306468 (2003-05-01), None
patent: 62260081 (1987-11-01), None
patent: 62260082 (1987-11-01), None
patent: 62260083 (1987-11-01), None
patent: 3150375 (1991-06-01), None
patent: 3290475 (1991-12-01), None
patent: 4041687 (1992-02-01), None
patent: 4052290 (1992-02-01), None
patent: 5112885 (1993-05-01), None
patent: 6228778 (1994-08-01), None
patent: 7041971 (1995-02-01), None
patent: 7157697 (1995-06-01), None
patent: 7166113 (1995-06-01), None
patent: 9205094 (1992-06-01), None
patent: WO92/07110 (1992-04-01), None
patent: WO96/19553 (1996-06-01), None
patent: WO97/31136 (1997-08-01), None
patent: WO9844167 (1998-10-01), None
patent: WO99/64646 (1999-12-01), None
patent: WO00/46423 (2000-08-01), None
patent: WO01/09275 (2001-02-01), None
patent: WO01/30888 (2001-05-01), None
patent: WO02/49960 (2002-06-01), None
patent: WO02/051945 (2002-07-01), None
patent: WO02/061158 (2002-08-01), None
patent: 9006002 (1991-05-01), None
“Zeta Potential In Colloid Science”, p. 228-229, 2 pages.
Busnaina, Moumen, & Piboontum, “Effective Contact Post-CMP Cleaning”, Clarkson University, NY, Semiconductor Fabtech—9th Edition, ISSN: 0087-6326, pp. 289-282.
Mikhaylichenko, Ravkin, and Lam Research Corp, CA, Stein & Hetherington, Sandia National Laboratory, NM, “Comparing Contact and Non-Contact Technology for Post-CMP Cleaning”, Semiconductor Fabtech—11th Edition, pp. 301-307.
Small, Peterson, Gorman, and Chan, “Post Clean Treatments and Post CMP Solutions for Metal and Particle Removal from VLSI Structures”, EKC Technology, Inc., CA, Semicondutor Fabtech—8th

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