Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate
2006-07-18
2006-07-18
Hassanzadeh, Parviz (Department: 1763)
Etching a substrate: processes
Nongaseous phase etching of substrate
Etching inorganic substrate
Reexamination Certificate
active
07077975
ABSTRACT:
A method and composition for removing Group VIII metal-containing materials from a surface (preferably, a platinum-containing, and more preferably, a platinum-rhodium-containing surface) involves the use of a mixture of phosphoric acid, sulfuric acid, nitric acid, and hydrochloric acid.
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Culbert Roberts
Hassanzadeh Parviz
Micro)n Technology, Inc.
Mueting Raasch & Gebhardt, P.A.
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