Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2007-10-30
2007-10-30
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
C347S077000, C257SE21001
Reexamination Certificate
active
11003822
ABSTRACT:
Methods and apparatuses are provided for depositing a material on a surface. In accordance with the method a stream of a component material is formed having formed printing and non-printing droplets and satellite droplets of the material. The stream is directed at the surface. A deflecting energy is applied to separate printing droplets from non-printing droplets in the stream, so that only printing droplets travel to the surface. The deflecting energy is adapted to direct non-printing droplets for non-printing drop collection, and to direct at least a portion of the satellite droplets to be controlled in a manner adapted to prevent the material in the satellite droplets from reaching the surface, so that less than all of the material in the satellite droplets reaches the surface. Articles are also provided having limited satellite material.
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Edward Cohen & Edgar Gutoff,Modern Coating and Drying Technology, published by John Wiley & Sons, Inc., 1992.
Hawkins Gilbert A.
Payne Jason A.
Sharma Ravi
Wexler Ronald M.
Eastman Kodak Company
Geyer Scott B.
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