Methods and apparatus to evenly clamp semiconductor substrates

Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – To produce composite – plural part or multilayered article

Reexamination Certificate

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Details

C264S271100, C264S271100, C264S271100, C264S279100, C425S572000, C425S116000, C425S111000, C425S125000

Reexamination Certificate

active

08043545

ABSTRACT:
Methods and apparatus to evenly clamp semiconductor substrates in a transfer mold process are disclosed. A disclosed split mold base includes a first plate having a first surface, a second plate having a second surface opposite the first surface, and a plurality of springs that are disposed between the first and second plates to distribute a clamping pressure applied by a mold press.

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“Semiconductor Packaging Assembly Technology,” National Semiconductor, Aug. 1999 (8 pages).

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