Methods and apparatus for treating wafer-like articles

Cleaning and liquid contact with solids – Processes – Using solid work treating agents

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15 21D, 51118, 118319, 134 25A, 134 33, 134 80, 134134, B08B 104

Patent

active

039704718

ABSTRACT:
Wafer-like articles are inserted through an input port into one of a plurality of slots in a rotatable disc having a slotted periphery. The disc is disposed in a vertical plane between a pair of closely-spaced parallel plates which laterally retain the articles in the slots. The slots advantageously are inclined toward the direction of rotation so that the wafers tend to remain therein as rotation and treating proceeds. The rotating disc urges each article between the plates to an aperture in one of the plates through which one side of the article is exposed to a treating medium, such as a scrubbing brush and detergent solution. Further rotation of the disc brings each article to an aperture in the opposing plate through which another side of the article is exposed to another treating medium of like or different kind. Still further rotation of the disc brings each article to an exit port, which is arranged in relation to the slots for gravity discharge of the article from the disc into a suitable storage and handling mechanism. In the case of cleaning with brushes and detergents, a suitable handling medium may include a multi-slotted magazine submerged in a water reservoir. A water-bearing mechanism advantageously is used at the input and exit ports to avoid adherence of the wet articles to the opposed plates due to surface tension.

REFERENCES:
patent: 2439466 (1948-04-01), Gravley
patent: 2740375 (1956-04-01), Diehl et al.
patent: 3489608 (1970-01-01), Jacobs et al.
patent: 3585668 (1971-06-01), Jaccodine et al.
patent: 3664872 (1972-05-01), Frank et al.
patent: 3691694 (1972-09-01), Goetz et al.

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