Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2006-08-01
2006-08-01
Morgan, Eileen P. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S285000
Reexamination Certificate
active
07083501
ABSTRACT:
Method and apparatus for chemically and mechanically planarizing the surface of a silicon wafer which includes a compressible non-cellualar lapping surface and a slurry disposed between the wafer and the lapping surface.
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Morgan Eileen P.
Snell & Wilmer L.L.P.
SpeedFam-IPEC Corporation
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