Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-01-30
2007-01-30
Font, Frank G. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
C396S521000
Reexamination Certificate
active
10251729
ABSTRACT:
Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.
REFERENCES:
patent: 4076423 (1978-02-01), Bates
patent: 4105289 (1978-08-01), Hershel
patent: 4191477 (1980-03-01), Schick
patent: 4399356 (1983-08-01), Feinleib et al.
patent: 4575248 (1986-03-01), Horwitz et al.
patent: 4583855 (1986-04-01), Bareket
patent: 4624569 (1986-11-01), Kwon
patent: 4690555 (1987-09-01), Ellerbroek
patent: 4696573 (1987-09-01), Hutchin
patent: 4725138 (1988-02-01), Wirth et al.
patent: 4762989 (1988-08-01), Motooka
patent: 4824243 (1989-04-01), Wheeler et al.
patent: 4832489 (1989-05-01), Wyant et al.
patent: 4836681 (1989-06-01), Van Saders et al.
patent: 5127731 (1992-07-01), DeGroot
patent: 5189677 (1993-02-01), Yry
patent: 5349432 (1994-09-01), Elerath
patent: 5392116 (1995-02-01), Makosch
patent: 5398113 (1995-03-01), de Groot
patent: 5410397 (1995-04-01), Toeppen
patent: 5555471 (1996-09-01), Xu et al.
patent: 5589938 (1996-12-01), Deck
patent: 5606417 (1997-02-01), Primot et al.
patent: 5663793 (1997-09-01), de Groot
patent: 5777741 (1998-07-01), Deck
patent: 5835133 (1998-11-01), Moreton et al.
patent: 5870191 (1999-02-01), Shirley et al.
patent: 5880838 (1999-03-01), Marx et al.
patent: 5880841 (1999-03-01), Marron et al.
patent: 5883717 (1999-03-01), DiMarzio et al.
patent: 5900936 (1999-05-01), Shirley et al.
patent: 5907404 (1999-05-01), Marron et al.
patent: 5914782 (1999-06-01), Sugiyama
patent: 5926283 (1999-07-01), Hopkins
patent: 5933236 (1999-08-01), Sommargren
patent: 5982497 (1999-11-01), Hopkins
patent: 5987189 (1999-11-01), Schmucker et al.
patent: 5995223 (1999-11-01), Power
patent: 6304330 (2001-10-01), Millerd et al.
patent: 19652113 (1998-06-01), None
patent: WO 97/41478 (1997-11-01), None
patent: WO97/41478 (1997-11-01), None
Smythe, R., et al., “Instanteous Phase Measuring Interferometry,”Optical Engineering23:4 (Jul./Aug. 1984): 361-4.
Barrientos, B., et al., “Transient Deformation Measurement with ESPI Using a Diffractive Optical Element for Spatial Phase-stepping,” FRINGE, Akademie Verlag (1997): 371-8.
Koliopoulos, C., “Suimltaneous Phase Shift Interferometer,” Proc. of SPIE vol. 0531, Optical Manufacturing and Testing II, ed. V J Doherty (Jan. 1992): 119-127.
Bareket, N., “Three-Channel Phase Detector for Pulsed Wavefront Sensing,” Proc. of SPIE vol. 0551, Adaptive Optics, ed. Jacques E. Ludman (Apr. 1985): 12-16.
Kwon, O., et al., “Multichannel Grating Phase-Shit Interferometer,” Proc. of SPIE vol. 0599, Optics in Engineering Measurement, ed. William F. Fagan (Dec. 1985): 273-278.
Smythe, R., et al., “Instantaneous Phase Measuring Interferometry,” Proc. of SPIE vol. 0429, Precision Surface Metrology, ed. James C. Wyant (Aug. 1983): 16-21.
Hettwer, A, et al., “Single-Frame-Interferometer for testing surfaces,”Lehrstuhl fur Optik—Annual Report, Physikalisches Institut, Friedrich-Alexander-Universitat Erlangen Nurnberg, (1997): 22.
Kranz, J., et al., “Error Analysis for a single-frame Phase-shifting Speckle-Interferometer,” Proc. of SPIE vol. 3749, Part of the 18thCongress of the International Commission for Optics (Aug. 1999): 178-79.
Hettwer, A, et al., “Three Channel Phase-shifting Interferometer Using Polarization-optics and a Diffraction Grating,” Opt. Eng. vol. 39, No. 4 (Apr. 2000): 960-66.
Kranz, J., and J. Schwider, “Single-frame Realtime Interferometer (SIFRI)”, www.optik.uni-erlangen.de/mikos/Projects/SIRFI/SIFRI.htm, 1998.
Brock Neal J.
Millerd James E.
MetroLaser, Inc.
Natividad Phil
Satermo Eric K.
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